沈俊良

Shen, Jyung-lyang

碳化矽汙泥、氟化鈣汙泥、成分分析、回收再利用、工藝品

Silicon carbide sludge, Calcium fluoride sludge, Chemical analysis, Recycling, Crafts

本研究探討光電及半導體廠等科技業者於製程中產生的碳化矽與氟化鈣汙泥進行各項特性分析，以利回收再運用於工藝產品之開發。由熱分析結果顯示，所選測之氟化鈣汙泥之含水率則為 52.03%，燒失量為 3.58%，灰份為 45.39%，需要熱處理溫度約為130℃；碳化矽汙泥含水率為 16.12%，燒失量為 26.58%，灰份為 57.30%，需要熱處理溫度約為 200℃。實驗發現，用 WDS-XRF 半定量分析氟化鈣汙泥成分時，可得氟化鈣汙泥成分回收加總計算接近 100%。兩種汙泥微量雜質部分分析結果與 ICP 的測值接近。碳化矽汙泥的礦物分析結果顯示有四種結晶相，包含矽、6H 碳化矽、15R 碳化矽以及金屬鐵。另外亦發現，運用 XRD 相對強度校正半定量方式來計算碳化矽汙泥中的碳化矽以及矽之含量，其結果與用 XRD 光譜計算軟體 TOPAS 結果相近。實驗分析結果顯示採用 WDS-XRF 以及 XRD 半定量掃描可以提供氟化鈣以及碳化矽汙泥成分分析參考之用，不但可進行全元素掃描，同時分析時程也可以大幅縮短，有助於提升業者回收再利用之效率。最後並利用此兩種汙泥搭配石門水庫汙泥以及玻璃原料，用不同製程開發成風鈴、花器、茶杯、杯墊、白色玻璃杯等工藝產品，藉以示範此兩種汙泥再利用於工藝領域之可行性，提高其回收使用率，減少自然資源浪費。

This study explores the characteristics of silicon carbide and calcium fluoride sludges produced by optoelectronics and semiconductor factories and discusses the feasibility of their use in crafts. The appropriate heat treatment temperatures of calcium fluoride and silicon carbide sludges are 130°C and 200°C respectively, as obtained by DT/DTA analysis. WDS-XRF results showed the total recovery calculation of calcium fluoride sludge components can be close to 100%. The analysis results of trace impurities of both sludges are close to those measured by ICP. The XRD analysis showed that silicon carbide sludge contains four crystalline phases, including silicon, 6H-silicon carbide, 15R-silicon carbide, and iron. The XRD relative intensity correction method is used to calculate silicon carbide and silicon content in silicon carbide sludge, and the results are similar to those calculated by the TOPAS software. Finally, these two types of sludges, along with Shimen Reservoir sludge and glass raw materials, were used to develop craft products such as wind chimes, flower vases, tea cups, coasters, and white glasses using different processes, including ingot pressing, 3D printing, and slip-casting. This is to demonstrate the feasibility of reusing these two types of sludge, improve their recycling rate, and reduce the waste of natural resources.